用于传感应用的超薄SOI谐振器的性能外文翻译资料

 2021-11-05 09:11

英语原文共 15 页

See discussions, stats, and author profiles for this publication at: https://www.researchgate.net/publication/262766837

用于传感应用的超薄SOI谐振器的性能

Article in Optics Express · June 2014

DOI: 10.1364/OE.22.014166

CITATIONS READS

30 109

  1. 位作者, 包括:

Sahba Talebi Fard Valentina Donzella

University of British Columbia - Vancouver The University of Warwick

25 PUBLICATIONS 425 CITATIONS 35 PUBLICATIONS 399 CITATIONS

SEE PROFILE SEE PROFILE

Shon Schmidt Samantha Grist

University of Washington Seattle University of British Columbia - Vancouver

  1. PUBLICATIONS 308 CITATIONS 40 PUBLICATIONS 766 CITATIONS

SEE PROFILE SEE PROFILE

本出版物的一些作者也在研究这些相关项目::

使用全介电CMOS兼容的超材料显着减少串扰查看项目

硅光子学课程查看项目

用于传感应用的超薄SOI谐振器的性能

Sahba Talebi Fard,1,lowast; Valentina Donzella,1 Shon A. Schmidt,2

Jonas Flueckiger,1 Samantha M. Grist,1 Pouria TalebiFard,3

Yichen Wu,1 Rick J. Bojko,4 Ezra Kwok,5 Nicolas A. F. Jaeger,1 Daniel M. Ratner,2 and Lukas Chrostowski1

  1. Department of Electrical and Computer Engineering, The University of British Columbia

2332 Main Mall, Vancouver, BC, V6T 1Z4 Canada

  1. Department of bioengineering, The University of Washington

1705 NE Pacific Street, Seattle, WA 98195 USA

  1. Department of Computer Science, The University of British Columbia

2366 Main Mall, Vancouver, BC, V6T 1Z4 Canada

  1. Nanofabrication Facility, University of Washington Box 352143, Seattle, WA 98195-2143USA
  2. Department of Chemical and Biological Engineering, The University of British Columbia

2360 East Mall, Vancouver, BC, V6T 1Z3 Canada

lowast; Corresponding Author: Sahba TalebiFard lowast;sahbat@ece.ubc.ca

摘要:这项工作展示了超薄光学环谐振器的仿真和实验结果,与传统的基于绝缘体上硅(SOI)的谐振器传感器相比,具有更大的消逝场(EF)穿透深度,因此具有更大的灵敏度。对于感测应用而言,对包层介质的折射率的变化具有更高的灵敏度是合乎需要的,因为感兴趣的相互作用发生在该区域中。使用超薄波导(lt;100nm厚)有望增强体积和表面感测的灵敏度,因为EF增加了对包层的穿透。在这项工作中,提出了超薄谐振器传感器的设计和表征,在多项目晶圆服务的约束下

原文和译文剩余内容已隐藏,您需要先支付 30元 才能查看原文和译文全部内容!立即支付

以上是毕业论文外文翻译,课题毕业论文、任务书、文献综述、开题报告、程序设计、图纸设计等资料可联系客服协助查找。